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Research unit
EU RFP
Project number
96.0278-1
Project title
PROMPT II: Process optimization in multiple dimensions for semiconductor technology II
Project status Settled
 
Start date 01.02.1997
End date 31.05.1999
 
Granted total costs 505'064.00  CHF
Section EU Framework Programme
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % Not related to a specific discipline
Last modification of the project
10.05.2011