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Research unit
INNOSUISSE
Project number
9779.1;3 PFNM-NM
Project title
High-Acceleration Integrated Magnetic Bearing and Drive System for Semiconductor Wafers

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr.
Johann W. Kolar
ETH Zürich
Physikstrasse 3, ETH Zentrum / ETL
CH-8092 Zürich
044 632 28 34
kolar@lem.ee.ethz.ch