High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market

• Unité de recherche: INNOSUISSE
• Numéro de projet: 51003.1 IP-ENG
• Titre du projet anglais: High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market

Description succincte (Allemand)

High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market

Description succincte (Anglais)

High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market

Résumé des résultats (Abstract) (Allemand)

Building on a ground-breaking technology platform and strong and successful partnerships, this project aims at developing an etch-resistant and ultra-fast high-precision vacuum sensor, ready to conquer the largest and most demanding customer segment: the semiconductor market.