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Research unit
INNOSUISSE
Project number
51003.1 IP-ENG
Project title
High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market

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Short description
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Abstract
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CategoryText
Short description
(German)
High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market
Short description
(English)
High-precision resonant vacuum sensors: ultra-fast performance for conquering the semiconductor market
Abstract
(German)
Building on a ground-breaking technology platform and strong and successful partnerships, this project aims at developing an etch-resistant and ultra-fast high-precision vacuum sensor, ready to conquer the largest and most demanding customer segment: the semiconductor market.