Feasibility Study of COSAMI, a Compact EUV Source for Actinic Mask Inspection

• Unité de recherche: INNOSUISSE
• Numéro de projet: 19193.1 PFNM-NM
• Titre du projet anglais: Feasibility Study of COSAMI, a Compact EUV Source for Actinic Mask Inspection

Description succincte (Allemand)

Feasibility study : Machbarkeitsstudie für eine kompakte EUV-Quelle für eine aktinische Maskeninspektionseinrichtung (COSAMI)

Description succincte (Anglais)

Feasibility Study of COSAMI, a Compact EUV Source for Actinic Mask Inspection

Résumé des résultats (Abstract) (Allemand)

Extreme ultraviolet (EUV) lithography is the fabrication technology for the next generation of microelectronics. The objective of the present proposal is a feasibility study for a compact light source based on accelerator technology for EUV metrology. As novelties, the compact source is equipped with top-up injection and an undulator with small period length and low gap. The 3-D arrangement of the accelerators minimizes the footprint of the facility.

Résumé des résultats (Abstract) (Anglais)

Extreme ultraviolet (EUV) lithography is the fabrication technology for the next generation of microelectronics. The objective of the present proposal is a feasibility study for a compact light source based on accelerator technology for EUV metrology. As novelties, the compact source is equipped with top-up injection and an undulator with small period length and low gap. The 3-D arrangement of the accelerators minimizes the footprint of the facility.