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Research unit
INNOSUISSE
Project number
9779.1;3 PFNM-NM
Project title
High-Acceleration Integrated Magnetic Bearing and Drive System for Semiconductor Wafers
Project status Finished
 
Start date 01.10.2008
End date 02.04.2013
 
Granted total costs 208'880.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % T170 Electronics
Last modification of the project
27.11.2014