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Research unit
INNOSUISSE
Project number
2634.1;1 MJK
Project title
Untersuchung der plasmachemischen Reaktion bei der Reinigung von Metallen und Si-Wafern
Project status Finished
 
Start date 19.09.1993
End date 14.11.1996
 
Granted total costs 114'600.00  CHF
Section 7 Pluriannual Crédit
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % Not yet defined
Last modification of the project
27.11.2014