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Research unit
INNOSUISSE
Project number
127.036 IP-ICT
Project title
Model Predictive Control for Wafer Transport in Thin Film Deposition Tools using Combinatorial Optimization
Project status In Process
 
Start date 14.10.2025
End date 13.10.2027
 
Granted total costs 562'350.00  CHF
Section 50 ICT
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T125 Automation, robotics, control engineering
Last modification of the project