Research unit
Project number
25719.2 PFNM-NM
Project title
Extrem partikelarmer 300 mm Conditioning Tower für Halbleiterprozessanlagen der Technologieknoten < 10 nm
Project status Finished
Start date 01.08.2017
End date 01.01.2019
Granted total costs 498'968.88  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
Research disciplines
100 % T171 Microelectronics

Last modification of the project