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Research unit
INNOSUISSE
Project number
17613.2 PFNM-NM
Project title
Multilayer ALD films for capacitance diaphragm gauge sealing against halogen and oxygen industrial plasmas
Project status Finished
 
Start date 01.11.2015
End date 01.02.2018
 
Granted total costs 521'512.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project