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Research unit
INNOSUISSE
Project number
13498.1;5 PFFLM-NM
Project title
Development of a Novel High-Resolution Photolithography 6' System for Efficient LEDs and Other Photonic Devices
Project status Finished
 
Start date 01.01.2012
End date 19.12.2013
 
Granted total costs 282'305.00  CHF
Section 5 CTI
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
 
Research disciplines
100 % Not yet defined

Last modification of the project
27.11.2014