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Research unit
INNOSUISSE
Project number
7129.3;2 NMPP-NM
Project title
NANOscan: Linear technology for future semiconductor inspection systems
Project status Finished
 
Start date 01.10.2004
End date 28.06.2006
 
Granted total costs 515'000.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
27.11.2014