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Research unit
INNOSUISSE
Project number
6617.1;5 FHS-IW
Project title
Development of maskless Ion Beam LIGA technology for 3D, deep and high aspect ratio micro(nano) structuring of photoresist materials
Project status Finished
 
Start date 15.06.2003
End date 06.07.2006
 
Granted total costs 270'000.00  CHF
Section 14 University of Applied Sciences
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T150 Material technology
Last modification of the project
27.11.2014