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Research unit
INNOSUISSE
Project number
6617.1;5 FHS-IW
Project title
Development of maskless Ion Beam LIGA technology for 3D, deep and high aspect ratio micro(nano) structuring of photoresist materials

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr
Sergueï Mikhaïlov
CAFI - HE-Arc
Eplatures-Grises 17
CH-2300 La Chaux-de-fonds
032 930 14 45
serguei.mikhailov@he-arc.ch