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Research unit
INNOSUISSE
Project number
25594.1 PFNM-NM
Project title
High-precision resonant vacuum sensors for PVD coating systems

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Professor Doktor
André Bernard
OST - Ostschweizer Fachhochschule
Buchs
Werdenbergstrasse 4
CH-9471 Buchs SG
+41 81 755 34 66
andre.bernard@ost.ch

Implementation Partner

Doktor
Stéphane Kühne
microGauge AG
Dreikönigstrasse 7 3
CH-8002 Zürich
+41 44 642 34 46
s.kuehne@microgauge.ch