Research unit
Project number
25594.1 PFNM-NM
Project title
High-precision resonant vacuum sensors for PVD coating systems
Project status Finished
Start date 01.03.2017
End date 01.01.2019
Granted total costs 722'619.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
Research disciplines
100 % T171 Microelectronics

Last modification of the project