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Forschungsstelle
INNOSUISSE
Projektnummer
25594.1 PFNM-NM
Projekttitel
High-precision resonant vacuum sensors for PVD coating systems
Projekttitel Englisch
High-precision resonant vacuum sensors for PVD coating systems

Texte zu diesem Projekt
 DeutschFranzösischItalienischEnglisch
Kurzbeschreibung
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Abstract
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Erfasste Texte


KategorieText
Kurzbeschreibung
(Deutsch)
High-precision resonant vacuum sensors for PVD coating systems
Kurzbeschreibung
(Englisch)
High-precision resonant vacuum sensors for PVD coating systems
Abstract
(Deutsch)
The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.
Abstract
(Englisch)
The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.