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Research unit
INNOSUISSE
Project number
18616.1 PFNM-NM
Project title
High Volume Process for AlScN Thin Film deposition

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Professor Doktor
Paul Muralt
EPFL
Station 12
CH-1015 Lausanne
+41 21 693 49 57
paul.muralt@epfl.ch

Implementation Partner

Albert Koller
Evatec AG
CHE-111.705.163
Hauptstrasse 1a
CH-9477 Trübbach
+41 81 403 84 70
albert.koller@evatecnet.com