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Research unit
INNOSUISSE
Project number
17613.2 PFNM-NM
Project title
Multilayer ALD films for capacitance diaphragm gauge sealing against halogen and oxygen industrial plasmas

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Doktor
Ivo Utke
EMPA
Feuerwerkerstrasse 39
CH-3602 Thun
+41 33 228 29 57
ivo.utke@empa.ch

Implementation Partner

Doktor
Bernhard Andreaus
Inficon AG
CHE-101.283.338
Alte Landstrasse 6
LI-9496 Balzers
+423 338 32 22
bernhard.andreaus@inficon.com