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Research unit
INNOSUISSE
Project number
13498.1;5 PFFLM-NM
Project title
Development of a Novel High-Resolution Photolithography 6' System for Efficient LEDs and Other Photonic Devices

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr.
Jens Gobrecht
PSI Paul Scherrer Institut
ODRA / 102
CH-5232 Villigen PSI
056 310 2529
jens.gobrecht@psi.ch