ServicenavigationHauptnavigationTrailKarteikarten

Research unit
INNOSUISSE
Project number
8068.2;4 NMPP-NM
Project title
Integrated Magnetic Bearing and Drive System for Semiconductor Wafers

Participants

Research organisation: Innosuisse
Swiss Innovation Agency
Einsteinstrasse 2
CH-3003 Bern
+41 58 461 61 61 (Call Center)
info@innosuisse.ch
www.innosuisse.ch/
Contact person

 Prof. Dr.
Johann Kolar
inspire AG
Swiss Federal Institute of Technolo
Rämistrasse 101
CH-8006 Zürich
044 632 11 11
kolar@lem.ee.ethz.ch