Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Forschungsstelle

INNOSUISSE

Projektnummer

6651.1;5 TNS-NM

Projekttitel

Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Projekttitel Englisch

Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Zugehörige Projekte

Forschungsorganisation:	Schweizerische Agentur für Innovationsförderung
Projektnummer	5393.1;5 TNS-NM
Projekttitel	3-D touch with 5 nm resolution and 20 nm repeatability for coordinate measuring machines