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Research unit
INNOSUISSE
Project number
6651.1;5 TNS-NM
Project title
Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Associated projects
Research organisation: Schweizerische Agentur für Innovationsförderung
Project number 5393.1;5 TNS-NM
Project title 3-D touch with 5 nm resolution and 20 nm repeatability for coordinate measuring machines