Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

• Forschungsstelle: INNOSUISSE
• Projektnummer: 6651.1;5 TNS-NM
• Projekttitel Englisch: Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines

Kurzbeschreibung (Englisch)

Supplement to: 3-D touch probe with 5 nm resolution and 20 nm repeatability for coordinate measuring machines