CVD-MONITORING: Improved CVD process control by in-situ spectroscopic monitoring

• Unité de recherche: PCRD EU
• Numéro de projet: 97.0564
• Titre du projet anglais: CVD-MONITORING: Improved CVD process control by in-situ spectroscopic monitoring

Mots-clé (Anglais)

CVD; FTIR; ceramic fibres; gas phase reaction; high temperature

Autre Numéro de projet (Anglais)

EU project number: BRPR-CT96-0322

Programme de recherche (Anglais)

EU-programme: 4. Frame Research Programme - 2.1 Industrial and materials technologies

Description succincte (Anglais)

See abstract

Autres indications (Anglais)

Full name of research-institution/enterprise:
Eidg. Materialprüfungs- und Forschungsanstalt EMPA
Hochleistungskeramik

Partenaires et organisations internationales (Anglais)

Coordinator: Fraunhofer Institut (D)

Résumé des résultats (Abstract) (Anglais)

EMPA Dübendorf has performed extensive investigations on a CVD process for growing amorphous Si-N-O ceramic fibres. This fibre reveals an excellent high temperature stability in chemical, structural and mechanical aspects. The long-range goal of this work was upscaling of the lab-scale process to pilot-scale production quantities and achievement of process control via intrared spectorscopy.
Production scale-up has been attained by construction of a prototype reactor (Swiss patent 1817/99) with an increased fibre growth area. To control the processing condition, analysis of the gas phase during fibre growth at 1450° has been performed by in-situ infrared spectroscopy. For performance of fundamental studies, the infrared device has been installed first at a lab-scale reactor. In an advanced stage the spectrometer has been transferred to the prototype reactor, thereby allowing comparison of the gas phase spectra analysed in the lab-scale and the pilot reactor. All gas species such as predicted by the fibre growth model could be detected in both reactors, especially SiO.

Références bases de données (Anglais)

Swiss Database: Euro-DB of the
State Secretariat for Education and Research
Hallwylstrasse 4
CH-3003 Berne, Switzerland
Tel. [phone]
Swiss Project-Number: 97.0564