Study of UV-LED light interaction with negative photoresists for cost-effective photolithography applications

Research unit

INNOSUISSE

Project number

37593.1 INNO-ENG

Project title

Study of UV-LED light interaction with negative photoresists for cost-effective photolithography applications

Texts for this project

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Short description		-	-
Abstract		-	-

Category	Text
Short description (German)	Study of UV-LED light interaction with negative photoresists for cost-effective photolithography applications
Short description (English)
Abstract (German)
Abstract (English)