High-precision resonant vacuum sensors: thermal management enabling new applications and unsurpassed performance

• Unité de recherche: INNOSUISSE
• Numéro de projet: 35250.1 IP-ENG
• Titre du projet anglais: High-precision resonant vacuum sensors: thermal management enabling new applications and unsurpassed performance

Description succincte (Allemand)

High-precision resonant vacuum sensors: thermal management enabling new applications and unsurpassed performance

Description succincte (Anglais)

High-precision resonant vacuum sensors: thermal management enabling new applications and unsurpassed performance

Résumé des résultats (Abstract) (Allemand)

This project builds up on the success of the microGauge project running until the end of 2018 and aims at mastering the technological challenges of a high-temperature thermo-stabilized vacuum sensor, significantly improving device performance and opening a broad field of new industrial applications.