Research unit
Project number
35250.1 IP-ENG
Project title
High-precision resonant vacuum sensors: thermal management enabling new applications and unsurpassed performance
Project status Finished
Start date 01.03.2019
End date 01.01.2021
Granted total costs 872'090.85  CHF
Section 70 Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
Research disciplines
100 % T171 Microelectronics

Last modification of the project