Quadruple functionality coatings against harsh environments in plasma etch tools

• Unité de recherche: INNOSUISSE
• Numéro de projet: 26853.1 PFNM-NM
• Titre du projet anglais: Quadruple functionality coatings against harsh environments in plasma etch tools

Description succincte (Allemand)

Quadruple functionality coatings against harsh environments in plasma etch tools

Description succincte (Anglais)

Quadruple functionality coatings against harsh environments in plasma etch tools

Résumé des résultats (Abstract) (Allemand)

We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.

Résumé des résultats (Abstract) (Anglais)

We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.