Quadruple functionality coatings against harsh environments in plasma etch tools - Texts

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Research unit

INNOSUISSE

Project number

26853.1 PFNM-NM

Project title

Quadruple functionality coatings against harsh environments in plasma etch tools

Texts for this project

	German	French	Italian	English
Short description		-	-
Abstract		-	-

Inserted texts

Category	Text
Short description (German)	Quadruple functionality coatings against harsh environments in plasma etch tools
Short description (English)	Quadruple functionality coatings against harsh environments in plasma etch tools
Abstract (German)	We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.
Abstract (English)	We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.