Quadruple functionality coatings against harsh environments in plasma etch tools - Texte

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Forschungsstelle

INNOSUISSE

Projektnummer

26853.1 PFNM-NM

Projekttitel

Quadruple functionality coatings against harsh environments in plasma etch tools

Projekttitel Englisch

Quadruple functionality coatings against harsh environments in plasma etch tools

Texte zu diesem Projekt

	Deutsch	Französisch	Italienisch	Englisch
Kurzbeschreibung		-	-
Abstract		-	-

Erfasste Texte

Kategorie	Text
Kurzbeschreibung (Deutsch)	Quadruple functionality coatings against harsh environments in plasma etch tools
Kurzbeschreibung (Englisch)	Quadruple functionality coatings against harsh environments in plasma etch tools
Abstract (Deutsch)	We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.
Abstract (Englisch)	We aim for quadruple functionality (adherent, resistant, refurbishable, outgas barrier) ALD coatings to protect plasma exposed components from corrosion. This opens a new worldwide business for Inficon to supply long-live components for coating and etching tools in semiconductor industry.