High-precision resonant vacuum sensors for PVD coating systems

• Unité de recherche: INNOSUISSE
• Numéro de projet: 25594.1 PFNM-NM
• Titre du projet anglais: High-precision resonant vacuum sensors for PVD coating systems

Description succincte (Allemand)

High-precision resonant vacuum sensors for PVD coating systems

Description succincte (Anglais)

High-precision resonant vacuum sensors for PVD coating systems

Résumé des résultats (Abstract) (Allemand)

The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.

Résumé des résultats (Abstract) (Anglais)

The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.