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Research unit
INNOSUISSE
Project number
25594.1 PFNM-NM
Project title
High-precision resonant vacuum sensors for PVD coating systems

Texts for this project
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Short description
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Abstract
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CategoryText
Short description
(German)
High-precision resonant vacuum sensors for PVD coating systems
Short description
(English)
High-precision resonant vacuum sensors for PVD coating systems
Abstract
(German)
The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.
Abstract
(English)
The European PVD equipment manufacturing and end-user sector has a pronounced market-pull for more precise and robust vacuum measurement solutions, in particular in the high vacuum range, as revealed through an in-depth market study. Upon proving the technological expedience of a resonant sensor concept in a CTI feasibility study, this follow-up project proposes conceptual and fabrication-level research and development towards vacuum gauge products tailored to address the needs of the PVD industry sector.