HighIon: High ion generation, transmission and detection through a high duty-cycle and high energy acceptance time-of-flight analyser for secondary ion mass spectrometry (SIMS) applications and improvement of a caesium evaporator for SIMS

• Research unit: INNOSUISSE
• Project number: 25592.1 PFNM-NM

Short description (German)

HighIon: Hohe Ionenrate, Transmission und Detektion mittels eines Flugzeitmassenspektrometers mit hoher Taktfrequenz und hohen Extraktionsspannungen der Ionen. Weiterentwicklung eines Cs-Verdampfers für SIMS Anwendungen.

Short description (English)

HighIon: High ion generation, transmission and detection through a high duty-cycle and high energy acceptance time-of-flight analyser for secondary ion mass spectrometry (SIMS) applications and improvement of a caesium evaporator for SIMS

Abstract (German)

The main objective is to improve the sensitivity of SIMS analysis on a FIB-SIMS instrument to secure and increase Tofwerk's market share in a highly growing international market. A new time-of-flight mass spectrometer with higher transmission and high voltage ion optics will be developed. The detection sensitivity, important to analyse the elemental composition of a small sputtered volume, will significantly increase. Additionally, caesium deposition during sputtering will further enhance sensitivity and ease the quantification of SIMS signals

Abstract (English)

The main objective is to improve the sensitivity of SIMS analysis on a FIB-SIMS instrument to secure and increase Tofwerk's market share in a highly growing international market. A new time-of-flight mass spectrometer with higher transmission and high voltage ion optics will be developed. The detection sensitivity, important to analyse the elemental composition of a small sputtered volume, will significantly increase. Additionally, caesium deposition during sputtering will further enhance sensitivity and ease the quantification of SIMS signals