Control of Traveling EM Waves in Large Area (VHF) PECVD Reactors for the Production of Competitive Solar Panels

• Forschungsstelle: INNOSUISSE
• Projektnummer: 14823.1;9 PFNM-NM
• Projekttitel Englisch: Control of Traveling EM Waves in Large Area (VHF) PECVD Reactors for the Production of Competitive Solar Panels

Kurzbeschreibung (Deutsch)

Control of Traveling EM Waves in Large Area (VHF) PECVD Reactors for the Production of Competitive Solar Panels

Kurzbeschreibung (Englisch)

Control of Traveling EM Waves in Large Area (VHF) PECVD Reactors for the Production of Competitive Solar Panels

Abstract (Deutsch)

In order to increase market share and the economic viability of silicon thin film photovoltaic electricity, the production costs must be reduced and module efficiency improved. This project evaluates alternative concepts for the Plasma Enhanced Chemical Vapour Deposition of silicon films deposited over large areas substrates (>1.4 m2) and sustained at very high frequencies (40-200 MHz). The scientific challenge consists in avoiding the large non-uniformities of the electrical field uniformity generated by standing wave effects. Several concepts will be numerically tested and the most promising will be validated by a experimental setup.

Abstract (Englisch)

In order to increase market share and the economic viability of silicon thin film photovoltaic electricity, the production costs must be reduced and module efficiency improved. This project evaluates alternative concepts for the Plasma Enhanced Chemical Vapour Deposition of silicon films deposited over large areas substrates (>1.4 m2) and sustained at very high frequencies (40-200 MHz). The scientific challenge consists in avoiding the large non-uniformities of the electrical field uniformity generated by standing wave effects. Several concepts will be numerically tested and the most promising will be validated by a experimental setup.