Research unit
Project number
14823.1;9 PFNM-NM
Project title
Control of Traveling EM Waves in Large Area (VHF) PECVD Reactors for the Production of Competitive Solar Panels
Project status Finished
Start date 01.02.2013
End date 28.11.2014
Granted total costs 175'340.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Non divisible / inclassable research
Research disciplines
100 % T171 Microelectronics

Last modification of the project