Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

• Unité de recherche: INNOSUISSE
• Numéro de projet: 9208.1;5 PFNM-NM
• Titre du projet anglais: Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

Description succincte (Allemand)

Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

Description succincte (Anglais)

Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

Résumé des résultats (Abstract) (Allemand)

The purpose of overall project is the development of a prototype of a scanning probe and scanning electron hybrid microscope technology as universal, versatile nano-analysis and nano-manipulation instrument. The goal of this feasibility study is to develop a simple prototype using existing equipment that would allow to precisely define project objectives and a technology implementation plan. The commercial goal is to innovate in the mid-term the SEM market, with a highly sensitive, price-competitive research grade hybrid instrument.

Résumé des résultats (Abstract) (Anglais)

The purpose of overall project is the development of a prototype of a scanning probe and scanning electron hybrid microscope technology as universal, versatile nano-analysis and nano-manipulation instrument. The goal of this feasibility study is to develop a simple prototype using existing equipment that would allow to precisely define project objectives and a technology implementation plan. The commercial goal is to innovate in the mid-term the SEM market, with a highly sensitive, price-competitive research grade hybrid instrument.