Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

• Research unit: INNOSUISSE
• Project number: 9208.1;5 PFNM-NM

Short description (German)

Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

Short description (English)

Scanning probe microscope inside a scanning electron/ion microscope for hybrid applications

Abstract (German)

The purpose of overall project is the development of a prototype of a scanning probe and scanning electron hybrid microscope technology as universal, versatile nano-analysis and nano-manipulation instrument. The goal of this feasibility study is to develop a simple prototype using existing equipment that would allow to precisely define project objectives and a technology implementation plan. The commercial goal is to innovate in the mid-term the SEM market, with a highly sensitive, price-competitive research grade hybrid instrument.

Abstract (English)

The purpose of overall project is the development of a prototype of a scanning probe and scanning electron hybrid microscope technology as universal, versatile nano-analysis and nano-manipulation instrument. The goal of this feasibility study is to develop a simple prototype using existing equipment that would allow to precisely define project objectives and a technology implementation plan. The commercial goal is to innovate in the mid-term the SEM market, with a highly sensitive, price-competitive research grade hybrid instrument.