Design, characterisation and modelling of a reactive Low Energy Plasma (LEP) Source for SiGe processing

Research unit

INNOSUISSE

Project number

6816.1;6 IWS-IW

Project title

Design, characterisation and modelling of a reactive Low Energy Plasma (LEP) Source for SiGe processing

Texts for this project

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Short description (English)	Design, characterisation and modelling of a reactive Low Energy Plasma (LEP) Source for SiGe processing