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Research unit
INNOSUISSE
Project number
6654.1;3 NMS-NM
Project title
Micro jet perturbation reduction by etched high-pressure nozzles aiming reduction of street-width in chip-singulation by water-jet guided laser cutting

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Short description
(French)
Micro jet perturbation reduction by etched high-pressure nozzles aiming reduction of street-width in chip-singulation by water-jet guided laser cutting