Numerical Modelling for large aera plasma enhanced chemical vapour deposition (PECVD) reactor development

Research unit

INNOSUISSE

Project number

6236.2;6 IWS-IW

Project title

Numerical Modelling for large aera plasma enhanced chemical vapour deposition (PECVD) reactor development

Texts for this project

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Short description (German)	Numerical Modelling for large aera plasma enhanced chemical vapour deposition (PECVD) reactor development