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Research unit
INNOSUISSE
Project number
5828.1;5 TNS-NM
Project title
MELODE:MEMBRANE FOR LOCAL DEPOSITION: Apparatus and method for defining surface structures at the micron and nanoscale beyond lithography.

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(English)
MELODE:MEMBRANE FOR LOCAL DEPOSITION: Apparatus and method for defining surface structures at the micron and nanoscale beyond lithography.