New SAW filters for digital applications: modifications of LiTaO3 substrate electronic properties by means of deep and shallow ion implantation

Research unit

INNOSUISSE

Project number

5243.2;3 FHS-IW

Project title

New SAW filters for digital applications: modifications of LiTaO3 substrate electronic properties by means of deep and shallow ion implantation

Texts for this project

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Short description (French)	New SAW filters for digital applications: modifications of LiTaO3 substrate electronic properties by means of deep and shallow ion implantation