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Research unit
INNOSUISSE
Project number
47997.1 IP-ENG
Project title
Hycompact: A compact vertically stacked chamber for hybrid thin film processing
Project status In Process
 
Start date 01.11.2021
End date 01.11.2023
 
Granted total costs 598'996.08  CHF
Section 70 Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T150 Material technology
Last modification of the project