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Research unit
INNOSUISSE
Project number
44552.1 IP-ENG
Project title
Technological protocol development for production of 3D structures in light sensitive polymers with Sub-Wavelength Holographic Lithography
Project status Finished
 
Start date 01.09.2020
End date 01.09.2022
 
Granted total costs 579'306.41  CHF
Section 70 Engineering
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % P265 Semiconductory physics
Last modification of the project