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Research unit
METAS
Project number
F-5111.30121
Project title
18NRM07 NanoXSpot: Measurement of the focal spot size of X-ray tubes with spot sizes down to 100 nm
Project status Finished
 
Start date 01.07.2019
End date 30.06.2022
 
Section 5111 Length, Nano- and Micro-technology
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % P180 Metrology, physical instrumentation
Last modification of the project
27.03.2024