18NRM07 NanoXSpot: Measurement of the focal spot size of X-ray tubes with spot sizes down to 100 nm

• Forschungsstelle: METAS
• Projektnummer: F-5111.30121

Schlüsselwörter (Englisch)

X-ray, focal spot, spot position, nanometre gauge, nano-computed tomography, X-ray microscopy

Kurzbeschreibung (Englisch)

X-ray-based computed tomography (CT) systems are increasingly used in industries such as aerospace, and medical devices for the non-destructive testing and evaluation of defects and structure. Such industries require inspection resolutions at the nanometre scale and the overall aim of this project is to develop traceable measurement methods for determining the focal spot size, shape, and position of nanometre resolution X-ray tubes. The project will use these methods in the preparation of prenormative documents to be submitted to CEN TC 138 (Non-destructive testing) WG 1 (Radiographic testing) and to revise standards in the EN 12453 series for focal spot measurements to harmonise standards and measurement methods between CEN, ISO, and ASTM.

This is a joint research project carried out in the framework of the European Metrology Programme for Innovation and Research (EMPIR) (see:http://www.euramet.org/research-innovation/empir/). The EMPIR initiative is co-funded by the European Unions's Horizon 2020 research and innovation programme and the participating states. METAS is one of the project partners in the project.

Projektziele (Englisch)

The objectives of the project are to develop a traceable method for the measurement of focal spot sizes in the nanometre range and to provide a draft standard to be submitted to CEN TC 138 WG 1.

The specific objectives of the project are:

1. To develop a traceable measurement method for determining the spot size, shape, and position of X-ray tubes from 100 nm to 5 μm including the uncertainty of the measurements (precision and bias) with measurement uncertainty below 10 %.
2. To develop traceable methods with uncertainty < 5 % to characterise nanometre gauges used for the measurement of spot size, shape, and position taking into consideration line pattern and edge structures.
3. To develop numerical algorithms for the calculation of spot parameter measurements (i.e. size, position and shape) made using nanometre gauges, including software implementation using numerical modelling and an evaluation of other parameters affecting spot size.
4. To perform inter- and intra-laboratory comparisons of the methods developed in objectives 1-3 and from the results validate the methods. Further, to incorporate the new methods into a draft standard on the characterisation of X-ray tubes with focal spots < 5 μm.
5. To contribute to the standards development work of the technical committee CEN TC 138 WG 1, ISO TC 135 SC 5 and others, where appropriate, to ensure that the outputs of the project are aligned with their needs, communicated quickly to those developing the standards and to those who will use them, and in a form that can be incorporated into the standards at the earliest opportunity.