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Research unit
INNOSUISSE
Project number
26853.1 PFNM-NM
Project title
Quadruple functionality coatings against harsh environments in plasma etch tools
Project status Finished
 
Start date 01.02.2018
End date 01.06.2021
 
Granted total costs 686'908.80  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T155 Coatings and surface treatment
Last modification of the project