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Research unit
INNOSUISSE
Project number
19193.1 PFNM-NM
Project title
Feasibility Study of COSAMI, a Compact EUV Source for Actinic Mask Inspection
Project status Finished
 
Start date 01.07.2016
End date 01.01.2017
 
Granted total costs 150'000.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project
25.03.2021