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Research unit
INNOSUISSE
Project number
18188.1 PFNM-NM
Project title
MURMELi: Multi-channel Ultra-Resolution Mask Exposure Lithography
Project status Finished
 
Start date 01.03.2016
End date 01.03.2019
 
Granted total costs 549'046.00  CHF
Section 22 Förderbereich Nano / Micro
Project category Project
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % T171 Microelectronics
Last modification of the project