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Research unit
METAS
Project number
F-5217.30062
Project title
EMPIR-14IND07: Metrology for manufacturing 3D stacked integrated circuits (3D Stack)
Project status Finished
 
Start date 01.06.2015
End date 31.05.2018
 
Section 5217 High frequency
Research type Applied research and development
NABS classification Industrial production and technology
 
Research disciplines
100 % P180 Metrology, physical instrumentation
Last modification of the project
04.03.2019